Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices

ABSTRACT

Packaged microelectronic devices and methods of manufacturing packaged microelectronic devices are disclosed herein. In one embodiment, a method of manufacturing a microelectronic device includes forming a stand-off layer over a plurality of microelectronic dies on a semiconductor workpiece, and removing selected portions of the stand-off layer to form a plurality of stand-offs with the individual stand-offs positioned on a backside of a corresponding die. The method further includes cutting the semiconductor workpiece to singulate the dies, and attaching the stand-off on a first singulated die to a second die.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 12/792,576filed Jun. 2, 2010, now U.S. Pat. No. 8,399,971, which is a divisionalof U.S. application Ser. No. 11/626,683 filed Jan. 24, 2007, now U.S.Pat. No. 7,741,150, which claims foreign priority benefits of SingaporeApplication No. 200608455-2 filed Dec. 4, 2006, now Singapore Patent No.143098, each of which is incorporated herein by reference.

TECHNICAL FIELD

The present disclosure is related to packaged microelectronic devicesand methods for manufacturing packaged microelectronic devices.

BACKGROUND

Processors, memory devices, imagers and other types of microelectronicdevices are often manufactured on semiconductor workpieces or othertypes of workpieces. In a typical application, several individual dies(e.g., devices) are fabricated on a single workpiece using sophisticatedand expensive equipment and processes. Individual dies generally includean integrated circuit and a plurality of bond-pads coupled to theintegrated circuit. The bond-pads provide external electrical contactson the die through which supply voltage, signals, etc., are transmittedto and from the integrated circuit. The bond-pads are usually verysmall, and they are arranged in an array having a fine pitch betweenbond-pads. The dies can also be quite delicate. As a result, afterfabrication, the dies are packaged to protect the dies and to connectthe bond-pads to another array of larger terminals that is easier toconnect to a printed circuit board.

Conventional processes for packaging dies include electrically couplingthe bond-pads on the dies to an array of pins, ball-pads, or other typesof electrical terminals, and then encapsulating the dies to protect themfrom environmental factors (e.g., moisture, particulates, staticelectricity, and physical impact). In one application, the bond-pads areelectrically connected to contacts on an interposer substrate that hasan array of ball-pads. For example, FIG. 1A schematically illustrates aconventional packaged microelectronic device 6 including amicroelectronic die 10, an interposer substrate 60 attached to the die10, a plurality of wire-bonds 90 electrically coupling the die 10 to theinterposer substrate 60, and a casing 70 protecting the die 10 fromenvironmental factors.

Electronic products require packaged microelectronic devices to have anextremely high density of components in a very limited space. Forexample, the space available for memory devices, imagers, processors,displays, and other microelectronic components is quite limited in cellphones, PDAs, portable computers, and many other products. As such,there is a strong drive to reduce the surface area or “footprint” of themicroelectronic device 6 on a printed circuit board. Reducing the sizeof the microelectronic device 6 is difficult because high performancemicroelectronic dies 10 generally have more bond-pads, which result inlarger ball-grid arrays and thus larger footprints. One technique usedto increase the density of microelectronic dies 10 within a givenfootprint is to stack one microelectronic die on top of another.

FIG. 1B schematically illustrates another conventional packagedmicroelectronic device 6 a having two stacked microelectronic dies 10a-b. The microelectronic device 6 a includes a substrate 60 a, a firstmicroelectronic die 10 a attached to the substrate 60 a, a spacer 30attached to the first die 10 a with a first adhesive 22 a, and a secondmicroelectronic die 10 b attached to the spacer 30 with a secondadhesive 22 b. The spacer 30 is a precut section of a semiconductorwafer. One drawback of the packaged microelectronic device 6 aillustrated in FIG. 1B is that it is expensive to cut semiconductorwafers to form the spacer 30. Moreover, attaching the spacer 30 to thefirst and second microelectronic dies 10 a-b requires additionalequipment and steps in the packaging process.

To address these concerns, some conventional packaged microelectronicdevices include an epoxy spacer, rather than a section of asemiconductor wafer, to space apart the first and second microelectronicdies 10 a and 10 b. The epoxy spacer is formed by dispensing a discretevolume of epoxy onto the first die 10 a and then pressing the second die10 b downward into the epoxy. One drawback of this method is that it isdifficult to position the second die 10 b parallel to the first die 10a. As a result, microelectronic devices formed with this method oftenhave “die tilt” in which the distance between the first and second diesvaries across the device. If the second die 10 b is not parallel to thefirst die 10 a, but rather includes a “high side,” the wire-bonds on thehigh side may be exposed after encapsulation. Moreover, the “low side”of the second die may contact the wire-bonds electrically connecting thefirst die to the substrate. This can cause an electrical short thatrenders the device defective. Accordingly, there is a need to improvethe process of packaging multiple dies in a single microelectronicdevice.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A schematically illustrates a conventional packagedmicroelectronic device in accordance with the prior art.

FIG. 1B schematically illustrates another conventional packagedmicroelectronic device in accordance with the prior art.

FIGS. 2-8 illustrate stages of a method of manufacturing a packagedmicroelectronic device in accordance with one embodiment of thedisclosure.

FIG. 2 is a schematic top plan view of a semiconductor workpiece.

FIG. 3 is a schematic side cross-sectional view of a portion of theworkpiece of FIG. 2.

FIG. 4 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece after forming an adhesive layer on the stand-offlayer.

FIG. 5 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece after removing sections of the stand-off andadhesive layers.

FIG. 6 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece after inverting the workpiece and reattachingthe workpiece to the support member.

FIG. 7 is a schematic side cross-sectional view of a microelectronicdevice assembly including a lead frame, a microelectronic die attachedto the lead frame, and a first singulated microelectronic deviceattached to the die.

FIG. 8 is a schematic side cross-sectional view of the microelectronicdevice assembly after attaching a second singulated microelectronicdevice to the first singulated microelectronic device.

FIG. 9 is a schematic side cross-sectional view of a packagedmicroelectronic device in accordance with another embodiment of thedisclosure.

FIGS. 10 and 11 illustrate stages of a method of manufacturing apackaged microelectronic device in accordance with another embodiment ofthe disclosure.

FIG. 10 is a schematic side cross-sectional view of a portion of aworkpiece including a stand-off structure and first and second adhesivelayers formed on the stand-off structure.

FIG. 11 is a schematic side cross-sectional view of a packagedmicroelectronic device in accordance with another embodiment of thedisclosure.

FIG. 12 is a schematic illustration of a system in which themicroelectronic devices may be incorporated.

DETAILED DESCRIPTION

Specific details of several embodiments are described below withreference to packaged microelectronic devices including two or threestacked microelectronic dies, but in other embodiments the packagedmicroelectronic devices can have a different number of stacked diesand/or may include other components. For example, the microelectronicdevices can include micromechanical components, data storage elements,optics, read/write components, or other features. The microelectronicdies can be SRAM, DRAM (e.g., DDR-SDRAM), flash-memory (e.g., NANDflash-memory), processors, imagers, and other types of devices.Moreover, several additional embodiments of the invention can havedifferent configurations, components, or procedures than those describedin this section. A person of ordinary skill in the art, therefore, willaccordingly understand that the invention may have other embodimentswith additional elements, or the invention may have other embodimentswithout several of the elements shown and described below with referenceto FIGS. 2-12.

FIGS. 2-8 illustrate stages of a method of manufacturing a packagedmicroelectronic device in accordance with one embodiment of thedisclosure. For example, FIG. 2 is a schematic top plan view of asemiconductor workpiece 100, and FIG. 3 is a schematic sidecross-sectional view of a portion of the workpiece 100. The illustratedsemiconductor workpiece 100 is a wafer 101 in and on which devices areconstructed. Specifically, referring only to FIG. 3, the workpiece 100includes a substrate 102 and a plurality of microelectronic dies 110(only three are shown) formed in and/or on the substrate 102. Theindividual dies 110 include an active side 112, a backside 114 oppositethe active side 112, a plurality of terminals 116 (e.g., bond-pads)arranged in an array on the active side 112, and an integrated circuit118 (shown schematically) operably coupled to the terminals 116.Although the illustrated dies 110 have the same structure, in otherembodiments the dies may have different features to perform differentfunctions.

After constructing the microelectronic dies 110, a stand-off layer 120is formed across the semiconductor workpiece 100 at the backsides 114 ofthe dies 110. The stand-off layer 120 can be formed on the workpiece 100by molding, spin-on techniques, film lamination, screen printing,spraying, brushing, a dip bath, or other suitable processes. Thestand-off layer 120 has a precise and generally uniform thickness andmay be generally incompressible. For example, the stand-off layer 120can be approximately 60 microns, but in other embodiments the stand-offlayer 120 can have a thickness greater than or less than 60 microns. Inseveral applications, the stand-off layer 120 can be made of a generallynon-compressible material. The stand-off layer 120 may be composed ofepoxy, epoxy acrylic, polyimide, or other suitable materials.

FIG. 4 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece 100 after forming an adhesive layer 140 on thestand-off layer 120. The adhesive layer 140 can be a die attach film orother suitable member for connecting the dies 110 to other dies asdescribed below. The combination of the stand-off and adhesive layers120 and 140 has a precise thickness T within the range of the desireddistance between pairs of stacked microelectronic dies in a packagedmicroelectronic device as described in greater detail below. In otherembodiments, the workpiece 100 may not include the adhesive layer 140.In either case, the semiconductor workpiece 100 can be removablyattached to a support member 190 during several processing procedures toprovide support to the workpiece 100. The support member 190 may includea dicing support having an annular frame 192 carrying a replaceable film194 that can include an attachment device 196 (e.g., UV tape) forreleasably adhering the support member 190 to the active side 112 of thedies 110.

FIG. 5 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece 100 after removing sections of the stand-off andadhesive layers 120 and 140 to form a plurality of discrete stand-offs130 with adhesive sections 142 on corresponding dies 110. Sections ofthe stand-off and adhesive layers 120 and 140 can be removed viaetching, cutting (e.g., with a wafer saw or dicing blade), or othersuitable methods. In other embodiments, the stand-off and/or adhesivelayer 120 and/or 140 can be composed of a photoactive material, andsections of these layers 120 and/or 140 can be exposed and developed toform the stand-offs 130. In either case, the individual stand-offs 130include a first surface 132 facing a corresponding die 110, a secondsurface 134 opposite the first surface 132, and a plurality of ends 136extending between the first and second surfaces 132 and 134. The firstsurfaces 132 are attached to corresponding dies 110 without an adhesivebecause the stand-offs 130 themselves adhere to the dies 110. The secondsurfaces 134 are generally planar and oriented parallel to the backsides114 of the dies 110. The ends 136 are spaced apart so that theillustrated stand-offs 130 are positioned inboard the terminals 116(i.e., between the terminals 116 and the center of the particular die110) and over the central portion of the corresponding dies 110.Although in the illustrated embodiment the stand-offs 130 have arectangular cross-sectional shape and are positioned on the dies 110 ina one-to-one correspondence, in other embodiments the stand-offs canhave other cross-sectional shapes and/or a plurality of stand-offs canbe formed on each die 110. In either case, the position of thestand-offs 130 is driven by the configuration of the dies to which theparticular stand-offs 130 are attached. The individual adhesive sections142 include a first surface 144 facing the second surface 134 of thecorresponding stand-off 130 and a second surface 146 opposite the firstsurface 144. The second surfaces 146 are generally planar and orientedparallel to the backsides 114 of the dies 110.

FIG. 6 is a schematic side cross-sectional view of the portion of thesemiconductor workpiece 100 after inverting the workpiece 100 andreattaching the workpiece 100 to the support member 190 with thestand-offs 130 positioned between the dies 110 and the support member190. Specifically, the workpiece 100 is removably attached to thesupport member 190 with the second surface 146 of the adhesive sections142 contacting the attachment device 196 (e.g., UV tape). The workpiece100 is then cut along lines A-A to singulate a plurality ofmicroelectronic devices 104. The individual microelectronic devices 104can be removed from the support member 190 via a conventionalpick-and-place apparatus.

FIG. 7 is a schematic side cross-sectional view of a microelectronicdevice assembly 103 including a support member or lead frame 150, amicroelectronic die 110 a attached to the lead frame 150, and a firstsingulated microelectronic device 104 a attached to the die 110 a. Forpurposes of brevity and clarity, hereinafter the die 110 a will bereferred to as a first die 110 a, and the die 110 of the firstsingulated microelectronic device 104 a will be referred to as a seconddie 110 b. The lead frame 150 includes (a) a die paddle 152 for carryingthe first die 110 a and the first singulated microelectronic device 104a, and (b) a plurality of leads 154 (only two are shown) for providingexternal electrical contacts. The first die 110 a can be eithergenerally similar to the second die 110 b or have different features toperform different functions. For example, the illustrated first die 110a includes an active side 112, a backside 114 opposite the active side112, a plurality of terminals 116 (e.g., bond-pads) arranged in an arrayon the active side 112, and an integrated circuit 118 (shownschematically) operably coupled to the terminals 116. The backside 114of the first die 110 a is attached to the die paddle 152 with anadhesive 148. After attaching the first die 110 a to the die paddle 152,the terminals 116 can be electrically coupled to corresponding leads 154with a plurality of first wire-bonds 160 a.

After connecting the first die 110 a to the lead frame 150, the firstsingulated microelectronic device 104 a can be attached to the first die110 a with the stand-off 130 positioned between the first and seconddies 110 a and 110 b. Specifically, the second surface 146 of theadhesive section 142 is placed against the active side 112 of the firstdie 110 a such that the first microelectronic device 104 a adheres tothe first die 110 a. In the illustrated embodiment, the stand-off 130and adhesive section 142 are positioned inboard the terminals 116 of thefirst die 110 a so as not to interfere with the first wire-bonds 160 a.Moreover, the combined thickness T of the stand-off 130 and the adhesivesection 142 is sized to space the first and second dies 110 a-b apart bya sufficient distance so that the first wire-bonds 160 a canelectrically couple the first die 110 a to the leads 154 withoutcontacting the second die 110 b. As such, the combined thickness T ofthe stand-off 130 and the adhesive section 142 is greater than adistance D that the first wire-bonds 160 a project from the activesurface 112 of the first die 110 a. After attaching the firstmicroelectronic device 104 a to the first die 110 a, the terminals 116of the second die 110 b are electrically coupled to corresponding leads154 with a plurality of second wire-bonds 160 b.

FIG. 8 is a schematic side cross-sectional view of the microelectronicdevice assembly 103 after attaching a second singulated microelectronicdevice 104 b to the first singulated microelectronic device 104 a. Thesecond microelectronic device 104 b can be attached to the firstmicroelectronic device 104 a in generally the same manner as the firstmicroelectronic device 104 a is attached to the first die 110 a. Afterattachment, the second microelectronic device 104 b is electricallyconnected to corresponding leads 154 with a plurality of thirdwire-bonds 160 c. In other embodiments, such as the embodiment describedbelow with reference to FIG. 9, the assembly 103 may not include thesecond microelectronic device 104 b or the assembly 103 may include fouror more microelectronic devices attached in a stacked configuration. Ineither case, a casing 170 is formed over the assembly 103 to encapsulatethe first die 110 a, the microelectronic devices 104, the wire-bonds160, and a portion of the lead frame 150. The encased assembly 103accordingly forms a packaged microelectronic device 103 a.

Several embodiments of the method of manufacturing the packagedmicroelectronic device 103 a illustrated in FIGS. 2-8 may enhance thequality and performance of the device 103 a because the semiconductorfabrication processes can reliably produce and assemble the variouscomponents with a high degree of precision. For example, the stand-offs130 and adhesive sections 142 can be formed with a precise, uniformthickness T so that the second and third microelectronic dies 110 b-care oriented generally parallel to the first microelectronic die 110 a.As a result, the packaged microelectronic device 103 a is expected tonot have problems with die tilt and the concomitant exposure and/orshorting of wire-bonds. Moreover, the stand-offs 130 can be formed withrelatively inexpensive materials, rather than expensive sections of asemiconductor wafer.

In one embodiment, a method of manufacturing a microelectronic deviceincludes forming a stand-off layer over a plurality of microelectronicdies on a semiconductor workpiece, and removing selected portions of thestand-off layer to form a plurality of stand-offs. The individualstand-offs are positioned on a backside of a corresponding die. Themethod further includes cutting the semiconductor workpiece to singulatethe dies, and attaching the stand-off on a first singulated die to asecond die.

In another embodiment, a method includes forming a stand-off on a firstmicroelectronic die, attaching a second microelectronic die to a supportmember, and coupling the stand-off to the second die. The stand-off iscoupled to the second die after forming the stand-off on the first dieand attaching the second die to the support member. The method furtherincludes encapsulating the first and second dies and at least a portionof the support member.

In another embodiment, a method includes molding a stand-off structure,forming an adhesive layer on the stand-off structure, and cutting thestand-off structure to form a plurality of stand-offs. The methodfurther includes attaching a first microelectronic die to a supportmember, coupling a first singulated stand-off to the first die, andconnecting a second microelectronic die to the first singulatedstand-off.

In another embodiment, a system comprises a microelectronic deviceincluding a support member and a first microelectronic die. The firstdie includes a backside attached to the support member, an active sideopposite the backside, a plurality of terminals at the active side, andan integrated circuit operably coupled to the terminals. The devicefurther includes a stand-off attached to the active side of the firstdie, and a second microelectronic die attached to the stand-off. Thesecond die includes a backside, an active side opposite the backside, aplurality of terminals at the active side, and an integrated circuitoperably coupled to the terminals. The backside of the second die isattached to the stand-off without an adhesive positioned between thestand-off and the backside of the second die.

In another embodiment, a semiconductor workpiece includes a substratehaving a plurality of microelectronic dies. The individual dies includean active side, a backside opposite the active side, a plurality ofterminals at the active side, and an integrated circuit operably coupledto the terminals. The workpiece further includes a plurality ofstand-offs on the backsides of corresponding dies, and a plurality ofadhesive sections attached to corresponding stand-offs.

In another embodiment, a microelectronic device includes amicroelectronic die, a stand-off coupled to the die, and an exposedadhesive attached to the stand-off. The die includes an exposed activeside, a backside opposite the active side, a plurality of terminals atthe active side, and an integrated circuit operably coupled to theterminals. The stand-off is positioned at least partially inboard theterminals of the die and includes a first surface attached to thebackside of the die and a second surface opposite the first surface. Theexposed adhesive is placed on the second surface of the stand-off.

FIG. 9 is a schematic side cross-sectional view of a packagedmicroelectronic device 203 in accordance with another embodiment of thedisclosure. The packaged microelectronic device 203 is generally similarto the packaged microelectronic device 103 a described above withreference to FIGS. 2-8. For example, the packaged microelectronic device203 includes a first die 110 a and a first microelectronic device 104 aattached to the first die 110 a. The illustrated packagedmicroelectronic device 203, however, does not include a secondmicroelectronic device attached to the first microelectronic device 104a. Moreover, the support member of the illustrated packagedmicroelectronic device 203 includes an interposer substrate 250 in lieuof a lead frame. The interposer substrate 250 includes a first side 252attached to the backside 114 of the first die 110 a and a second side253 opposite the first side 252. The first side 252 includes (a) aplurality of first contacts 254 a arranged in arrays for attachment tocorresponding first wire-bonds 160 a, and (b) a plurality of secondcontacts 254 arranged in arrays for attachment to corresponding secondwire-bonds 160 b. The second side 253 includes (a) a plurality of firstpads 256 a electrically connected to corresponding first contacts 254 awith a plurality of first conductive traces 258 a, and (b) a pluralityof second pads 256 b electrically connected to corresponding secondcontacts 254 b with a plurality of second conductive traces 258 b. Theillustrated packaged microelectronic device 203 further includes aplurality of electrical couplers 280 (e.g., solder balls) attached tothe first and second pads 256 a-b.

FIGS. 10 and 11 illustrate stages of a method of manufacturing apackaged microelectronic device in accordance with another embodiment ofthe disclosure. For example, FIG. 10 is a schematic side cross-sectionalview of a portion of a workpiece 300 including a stand-off structure 320and first and second adhesive layers 340 a-b formed on the stand-offstructure 320. The stand-off structure 320 has a circular, rectangular,or other suitable planform shape and includes a first major surface 322and a second major surface 324 opposite the first major surface 322. Thestand-off structure 320 includes a flowable dielectric material and canbe formed via molding or other suitable methods. After forming thestand-off structure 320, the first adhesive layer 340 a is placed on thefirst major surface 322 and the second adhesive layer 340 b is placed onthe second major surface 324. After attaching the adhesive layers 340,the workpiece 300 is cut along lines B-B to singulate a plurality ofindividual stand-offs 330 with corresponding adhesive sections 342 a-b.In other embodiments, the workpiece 300 may not include one or both ofthe adhesive layers 340 such that one or both of the major surfaces 322and 324 are exposed.

FIG. 11 is a schematic side cross-sectional view of a packagedmicroelectronic device 303 in accordance with another embodiment of thedisclosure. The packaged microelectronic device 303 is generally similarto the packaged microelectronic device 103 a described above withreference to FIGS. 2-8. For example, the packaged microelectronic device303 includes a lead frame 150, a first die 110 a attached to the leadframe 150, and a second die 110 b attached to the first die 110 a. Theillustrated packaged microelectronic device 303, however, furtherincludes a first singulated stand-off 330 positioned between the firstand second dies 110 a-b with the first adhesive section 342 a attachedto the active side 112 of the first die 110 a and the second adhesivesection 342 b attached to the backside 114 of the second die 110 b. Inadditional embodiments, the packaged microelectronic device 303 mayinclude three or more microelectronic dies 110 attached in a stackedconfiguration. In other embodiments, the packaged microelectronic device303 may include an interposer substrate in lieu of the lead frame 150.

Any one of the packaged microelectronic devices described above withreference to FIGS. 2-11 can be incorporated into any of a myriad oflarger and/or more complex systems 490, a representative one of which isshown schematically in FIG. 12. The system 490 can include a processor491, a memory 492 (e.g., SRAM, DRAM, Flash, and/or other memory device),input/output devices 493, and/or other subsystems or components 494.Microelectronic devices may be included in any of the components shownin FIG. 12. The resulting system 490 can perform any of a wide varietyof computing, processing, storage, sensor, imagers, and/or otherfunctions. Accordingly, representative systems 490 include, withoutlimitation, computers and/or other data processors, for example, desktopcomputers, laptop computers, Internet appliances, hand-held devices(e.g., palm-top computers, wearable computers, cellular or mobilephones, personal digital assistants), multi-processor systems,processor-based or programmable consumer electronics, network computers,and mini computers. Other representative systems 490 include cameras,light or other radiation sensors, servers and associated serversubsystems, display devices, and/or memory devices. In such systems,individual dies can include imager arrays, such as CMOS imagers.Components of the system 490 may be housed in a single unit ordistributed over multiple, interconnected units, e.g., through acommunications network. Components can accordingly include local and/orremote memory storage devices, and any of a wide variety ofcomputer-readable media.

From the foregoing, it will be appreciated that specific embodiments ofthe invention have been described herein for purposes of illustration,but that various modifications may be made without deviating from theinvention. For example, many of the elements of one embodiment can becombined with other embodiments in addition to or in lieu of theelements of the other embodiments. Accordingly, the invention is notlimited except as by the appended claims.

We claim:
 1. A method of manufacturing a microelectronic device, themethod comprising: molding a stand-off structure; forming an adhesivelayer on the stand-off structure; cutting the stand-off structure toform a plurality of stand-offs; attaching a first microelectronic die toa support member; coupling a first singulated stand-off to the firstdie; and connecting a second microelectronic die to the first singulatedstand-off.
 2. The method of claim 1 wherein molding a stand-offstructure comprises forming a stand-off structure having a first majorsurface and a second major surface opposite the first major surface, andwherein the first and second major surfaces are exposed.
 3. The methodof claim 1 wherein: the stand-off structure comprises a first majorsurface and a second major surface opposite the first major surface;forming the adhesive layer comprises disposing a first adhesive layer onthe first major surface; and the method further comprises placing asecond adhesive layer on the second major surface.
 4. The method ofclaim 1 wherein: attaching the first die to the support member comprisesconnecting a backside of the first die to the support member; andcoupling the first singulated stand-off to the first die comprisesattaching the first singulated stand-off to an active side of the firstdie.
 5. The method of claim 1 wherein: coupling the first singulatedstand-off to the first die comprises attaching the first singulatedstand-off to the first die with the stand-off and corresponding sectionof the adhesive layer projecting a first distance in a first directionfrom the first die; the method further comprises wire-bonding the firstdie to the support member with a plurality of wire-bonds; and theindividual wire-bonds project a second distance in the first directionfrom the first die, the second distance being less than the firstdistance.
 6. The method of claim 1 wherein attaching the first die tothe support member comprises coupling the first die to an interposersubstrate.
 7. The method of claim 1 wherein attaching the first die tothe support member comprises coupling the first die to a lead frame. 8.The method of claim 1 wherein connecting the second die to the firstsingulated stand-off comprises attaching the second die to the firstsingulated stand-off after coupling the first singulated stand-off tothe first die.